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Electron energy dependence of defect generation in high-k gate stacks
Publication:
Electron energy dependence of defect generation in high-k gate stacks
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
O'Connor, Robert
;
Pantisano, Luigi
;
Degraeve, Robin
;
Kauerauf, Thomas
;
Kaczer, Ben
;
Roussel, Philippe
;
Groeseneken, Guido
Journal
Journal of Applied Physics
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1916
since deposited on 2021-10-17
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Acq. date: 2025-12-10
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Metrics
Views
1916
since deposited on 2021-10-17
3
last month
Acq. date: 2025-12-10
Citations