dc.contributor.author | O'Connor, Robert | |
dc.contributor.author | Pantisano, Luigi | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Roussel, Philippe | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-17T09:24:52Z | |
dc.date.available | 2021-10-17T09:24:52Z | |
dc.date.issued | 2008 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14237 | |
dc.source | IIOimport | |
dc.title | Electron energy dependence of defect generation in high-k gate stacks | |
dc.type | Journal article | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 64503 | |
dc.source.journal | Journal of Applied Physics | |
dc.source.issue | 6 | |
dc.source.volume | 103 | |
dc.identifier.url | http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000103000006064503000001&idtype=cvips&prog=search | |
imec.availability | Published - open access | |