Reduced self-heating by strained silicon substrate engineering

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Authors

O'Neill, Anthony; Agaiby, Rimoon; Olsen, Sarah; Yang, Y.; Hellstrom, P.-E.; Ostling, M.; Oehme, M.; Lyutovich, K.; Kasper, E.; Eneman, Geert; Verheyen, Peter; Loo, Roger; Claeys, Cor; Fiegna, C.; Sangiorgi, E.

ISSN

0169-4332

Issue

19

Journal

Applied Surface Science

Volume

254

Title

Reduced self-heating by strained silicon substrate engineering

Publication type

Journal article

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