Show simple item record

Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis

dc.contributor.authorPacco, Antoine
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.authorWada, Masayuki
dc.date.accessioned2021-10-17T09:33:37Z
dc.date.available2021-10-17T09:33:37Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14262
dc.sourceIIOimport
dc.titleDrying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
dc.typeMeeting abstract
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.conference9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS
dc.source.conferencedate21/09/2008
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record