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Electrical evaluation of stiction during drying of high aspect ratio nanostructures

dc.contributor.authorPacco, Antoine
dc.contributor.authorWada, M.
dc.date.accessioned2021-10-17T09:33:54Z
dc.date.available2021-10-17T09:33:54Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14263
dc.sourceIIOimport
dc.titleElectrical evaluation of stiction during drying of high aspect ratio nanostructures
dc.typeMeeting abstract
dc.contributor.imecauthorPacco, Antoine
dc.source.peerreviewno
dc.source.conference34th International Conference on Micro & Nano Engineering - MNE
dc.source.conferencedate15/09/2008
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - imec


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