Publication:

Air-gap formation by UV-assisted decomposition of CVD material

Date

2008
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Pantouvaki, Marianna  
;
Humbert, Aurelie  
;
Van Besien, Els  
;
Camerotto, Elisabeth  
;
Travaly, Youssef
;
Richard, Olivier  
;
Willegems, Myriam  
;
Volders, Henny  
;
Kellens, Kristof  
;
Daamen, Roel
;
Hoofman, Romano  
;
Beyer, Gerald  

Journal

Abstract

Description

Metrics

Views

1990 since deposited on 2021-10-17
3last month
Acq. date: 2025-12-08

Citations

Metrics

Views

1990 since deposited on 2021-10-17
3last month
Acq. date: 2025-12-08

Citations