Publication:
The impact of ash on TDDB of metal-hard-mask-etched Cu/low-k interconnects
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1908 since deposited on 2021-10-17
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Acq. date: 2026-10-12
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Statistics
Views
1908 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-12
Citations