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Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices
Publication:
Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pelaz, L.
;
Duffy, Ray
;
Aboy, M.
;
Marques, L.
;
Lopez, P.
;
Santos, I.
;
Pawlak, Bartek
;
Van Dal, Mark
;
Duriez, Blandine
;
Merelle, Thomas
;
Doornbos, Gerben
;
Collaert, Nadine
;
Witters, Liesbeth
;
Rooyackers, Rita
;
Vandervorst, Wilfried
;
Jurczak, Gosia
;
Kaiser, M.
;
Weemaes, R.
;
Van Berkum, J.
;
Breimer, P.
;
Lander, Rob
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1990
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1990
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations