Publication:

Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

Date

2008
Proceedings Paper
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Author(s)

Pelaz, L.
;
Duffy, Ray
;
Aboy, M.
;
Marques, L.
;
Lopez, P.
;
Santos, I.
;
Pawlak, Bartek  
;
Van Dal, Mark  
;
Duriez, Blandine  
;
Merelle, Thomas
;
Doornbos, Gerben  
;
Collaert, Nadine  
;
Witters, Liesbeth  
;
Rooyackers, Rita
;
Vandervorst, Wilfried  
;
Jurczak, Gosia  
;
Kaiser, M.
;
Weemaes, R.
;
Van Berkum, J.
;
Breimer, P.
;
Lander, Rob

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1993 since deposited on 2021-10-17
1last month
Acq. date: 2026-04-05

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