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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions

dc.contributor.authorPetersen, D.H.
dc.contributor.authorLin, R.
dc.contributor.authorHansen, T.M.
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMarkvardsen, C.
dc.contributor.authorKjaer, D.
dc.contributor.authorNielsen, P.F.
dc.date.accessioned2021-10-17T09:48:24Z
dc.date.available2021-10-17T09:48:24Z
dc.date.issued2008
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14307
dc.sourceIIOimport
dc.titleComparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
dc.typeJournal article
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage362
dc.source.endpage367
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume26
imec.availabilityPublished - open access
imec.internalnotes


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