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High precision micro-scale Hall effect characterization method using in-line micro four-point probes

dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Olaf
dc.contributor.authorClarysse, Trudo
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorRosseel, Erik
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorLin, Rong
dc.contributor.authorNielsen, Peter
dc.date.accessioned2021-10-17T09:48:45Z
dc.date.available2021-10-17T09:48:45Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14308
dc.sourceIIOimport
dc.titleHigh precision micro-scale Hall effect characterization method using in-line micro four-point probes
dc.typeProceedings paper
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage251
dc.source.endpage255
dc.source.conference16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP
dc.source.conferencedate30/09/2008
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - open access


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