Authors

Pfeffer, Markus; Oechsner, Richard; Pfitzner, Lothar; Ryssel, Heiner; Ocker, Berthold; Verdonck, Patrick

Conference

ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - IDETC/CIE

Title

Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation

Publication type

Proceedings paper