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New properties of halogen plasma-treated Cu films

dc.contributor.authorPikulev, Vitaly
dc.contributor.authorDictus, Dries
dc.contributor.authorKlekachev, Alexander
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T09:51:58Z
dc.date.available2021-10-17T09:51:58Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14318
dc.sourceIIOimport
dc.titleNew properties of halogen plasma-treated Cu films
dc.typeOral presentation
dc.contributor.imecauthorDictus, Dries
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.source.peerreviewno
dc.source.conference11th International Symposium on Physics of Materials - ISPMA11
dc.source.conferencedate24/08/2008
dc.source.conferencelocationPrague Checz Republic
imec.availabilityPublished - imec


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