Improved characterization of high-k degradation with vacuum C-AFM
dc.contributor.author | Polspoel, Wouter | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Aguilera, Lidia | |
dc.contributor.author | Porti, Marc | |
dc.contributor.author | Nafria, Montserrat | |
dc.contributor.author | Aymerich, Xavier | |
dc.date.accessioned | 2021-10-17T09:55:20Z | |
dc.date.available | 2021-10-17T09:55:20Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14328 | |
dc.source | IIOimport | |
dc.title | Improved characterization of high-k degradation with vacuum C-AFM | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1074-I11-02 | |
dc.source.conference | Synthesis and Metrology of Nanoscale Oxides and Thin Films | |
dc.source.conferencedate | 22/03/2008 | |
dc.source.conferencelocation | San Fransisco, CA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Proceedings; Vol. 1074E |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |