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Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

dc.contributor.authorPolspoel, Wouter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorAguilera, Lidia
dc.contributor.authorPorti, Marc
dc.contributor.authorNafria, Montserrat
dc.contributor.authorAymerich, Xavier
dc.date.accessioned2021-10-17T09:55:59Z
dc.date.available2021-10-17T09:55:59Z
dc.date.issued2008
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14330
dc.sourceIIOimport
dc.titleNanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage1521
dc.source.endpage1524
dc.source.journalMicroelectronics Reliability
dc.source.issue8_9
dc.source.volume48
imec.availabilityPublished - imec
imec.internalnotespaper from ESREF09


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