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Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
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Authors
Polspoel, Wouter
;
Vandervorst, Wilfried
;
Aguilera, Lidia
;
Porti, Marc
;
Nafria, Montserrat
;
Aymerich, Xavier
ISSN
0026-2714
Issue
8_9
Journal
Microelectronics Reliability
Volume
48
Title
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Publication type
Journal article
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