Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

Publication:

2008

Journal article

Author(s)

Polspoel, Wouter

;

;

Aguilera, Lidia

;

Porti, Marc

;

Nafria, Montserrat

;

Aymerich, Xavier

Microelectronics Reliability

1966 since deposited on 2021-10-17

1last month

Acq. date: 2026-09-12