Publication:
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Date
| dc.contributor.author | Polspoel, Wouter | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Aguilera, Lidia | |
| dc.contributor.author | Porti, Marc | |
| dc.contributor.author | Nafria, Montserrat | |
| dc.contributor.author | Aymerich, Xavier | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-17T09:55:59Z | |
| dc.date.available | 2021-10-17T09:55:59Z | |
| dc.date.issued | 2008 | |
| dc.identifier.issn | 0026-2714 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14330 | |
| dc.source.beginpage | 1521 | |
| dc.source.endpage | 1524 | |
| dc.source.issue | 8_9 | |
| dc.source.journal | Microelectronics Reliability | |
| dc.source.volume | 48 | |
| dc.title | Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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