Publication:
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
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1956 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
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Metrics
Views
1956 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-09
Citations