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Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Publication:
Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors
Date
2008
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Polspoel, Wouter
;
Vandervorst, Wilfried
;
Aguilera, Lidia
;
Porti, Marc
;
Nafria, Montserrat
;
Aymerich, Xavier
Journal
Microelectronics Reliability
Abstract
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1953
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1953
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations