Horizontal integration of cavity filters on high-resistivity silicon thin-film technology

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Authors
Posada Quijano, Guillermo; Carchon, Geert; Nauwelaers, Bart; De Raedt, Walter
ISSN
0018-9480
Issue
12
Journal
IEEE Transactions on Microwave Theory and Techniques
Volume
56
Title
Horizontal integration of cavity filters on high-resistivity silicon thin-film technology
Publication type
Journal article
Embargo date
9999-12-31
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