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Horizontal integration of cavity filters on high-resistivity silicon thin-film technology

dc.contributor.authorPosada Quijano, Guillermo
dc.contributor.authorCarchon, Geert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.date.accessioned2021-10-17T09:58:36Z
dc.date.available2021-10-17T09:58:36Z
dc.date.issued2008
dc.identifier.issn0018-9480
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14338
dc.sourceIIOimport
dc.titleHorizontal integration of cavity filters on high-resistivity silicon thin-film technology
dc.typeJournal article
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2893
dc.source.endpage2901
dc.source.journalIEEE Transactions on Microwave Theory and Techniques
dc.source.issue12
dc.source.volume56
imec.availabilityPublished - open access


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