dc.contributor.author | Prager, Lutz | |
dc.contributor.author | Naumov, Sergei | |
dc.contributor.author | Pistol, L. | |
dc.contributor.author | Wennrich, L. | |
dc.contributor.author | Buchmeister, M. R. | |
dc.contributor.author | Marsik, Premysl | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-17T10:00:26Z | |
dc.date.available | 2021-10-17T10:00:26Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14343 | |
dc.source | IIOimport | |
dc.title | Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.source.peerreview | no | |
dc.source.conference | 17th Workshop Materials for Advanced Metallization | |
dc.source.conferencedate | 2/03/2008 | |
dc.source.conferencelocation | Dresden Germany | |
imec.availability | Published - imec | |