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Effect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths

dc.contributor.authorPrager, Lutz
dc.contributor.authorNaumov, Sergei
dc.contributor.authorPistol, L.
dc.contributor.authorWennrich, L.
dc.contributor.authorBuchmeister, M. R.
dc.contributor.authorMarsik, Premysl
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-17T10:00:26Z
dc.date.available2021-10-17T10:00:26Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14343
dc.sourceIIOimport
dc.titleEffect of pressure on efficiency of UV curing of CVD low-k material at different wavelengths
dc.typeMeeting abstract
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewno
dc.source.conference17th Workshop Materials for Advanced Metallization
dc.source.conferencedate2/03/2008
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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