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Fabrication, modelling and characterization of MEMS piezielectric vibration harvesters
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Authors
Renaud, Michael
;
Karakaya, Koray
;
Sterken, Tom
;
Fiorini, Paolo
;
Van Hoof, Chris
;
Puers, Bob
ISSN
0924-4247
Journal
Sensors and Actuators A: Physical
Volume
145-146
Title
Fabrication, modelling and characterization of MEMS piezielectric vibration harvesters
Publication type
Journal article
Embargo date
9999-12-31
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