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Fabrication, modelling and characterization of MEMS piezielectric vibration harvesters

dc.contributor.authorRenaud, Michael
dc.contributor.authorKarakaya, Koray
dc.contributor.authorSterken, Tom
dc.contributor.authorFiorini, Paolo
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-17T10:07:43Z
dc.date.available2021-10-17T10:07:43Z
dc.date.issued2008
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14365
dc.sourceIIOimport
dc.titleFabrication, modelling and characterization of MEMS piezielectric vibration harvesters
dc.typeJournal article
dc.contributor.imecauthorSterken, Tom
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorPuers, Bob
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage380
dc.source.endpage386
dc.source.journalSensors and Actuators A: Physical
dc.source.volume145-146
imec.availabilityPublished - open access


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