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Selective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD

dc.contributor.authorRomo Negreira, Ainhoa
dc.date.accessioned2021-10-17T10:15:39Z
dc.date.available2021-10-17T10:15:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14388
dc.sourceIIOimport
dc.titleSelective vertically aligned CNT growth in vias for BEOL applications, using catalyst electrodeposition and plasma CVD
dc.typeMeeting abstract
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on Surface Science and Nanotechnology - ISSS-5
dc.source.conferencedate9/11/2008
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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