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dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-17T10:17:46Z
dc.date.available2021-10-17T10:17:46Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14394
dc.sourceIIOimport
dc.titleRF-MEMS design, multi-physics simulation and reliability analysis
dc.typeOral presentation
dc.contributor.imecauthorRottenberg, Xavier
dc.source.peerreviewno
dc.source.conferenceCourse given at the EuroSimE Workshop: Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and
dc.source.conferencedate20/04/2008
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - imec


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