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High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorElata, David
dc.date.accessioned2021-10-17T10:19:04Z
dc.date.available2021-10-17T10:19:04Z
dc.date.issued2008-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14398
dc.sourceIIOimport
dc.titleHigh-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewyes
dc.source.conferenceNSTI Nanotech - 11th Annual Nanotechnology Conference and Trade Show
dc.source.conferencedate1/06/2008
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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