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Development of advanced corrosion free organic strippers for ULSI processing

dc.contributor.authorRotondaro, Antonio
dc.contributor.authorHonda, K.
dc.contributor.authorMaw, T.
dc.contributor.authorPerry, D.
dc.contributor.authorLux, Marcel
dc.contributor.authorHeyns, Marc
dc.contributor.authorClaeys, C.
dc.contributor.authorDaraktchiev, I.
dc.date.accessioned2021-09-29T15:19:34Z
dc.date.available2021-09-29T15:19:34Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1439
dc.sourceIIOimport
dc.titleDevelopment of advanced corrosion free organic strippers for ULSI processing
dc.typeProceedings paper
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage537
dc.source.endpage43
dc.source.conferenceProceedings of the Fourth International Symposium on Cleaning technology in Semiconductor Device Manufacturing
dc.source.conferencedate9/10/1995
dc.source.conferencelocationChicago, IL USA
imec.availabilityPublished - open access
imec.internalnotesECS Proceedings; Vol. 95-20


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