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Interface and defect control for group IV channel engineering

dc.contributor.authorSakai, Akira
dc.contributor.authorOhara, Yuji
dc.contributor.authorUeda, Takaya
dc.contributor.authorToyoda, Eiji
dc.contributor.authorIzunome, Koji
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorShimura, Yosuke
dc.contributor.authorNakatsuka, Osamu
dc.contributor.authorOgawa, Masaki
dc.contributor.authorZaima, Shigeaki
dc.contributor.authorKimura, Shigeru
dc.date.accessioned2021-10-17T10:23:59Z
dc.date.available2021-10-17T10:23:59Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14412
dc.sourceIIOimport
dc.titleInterface and defect control for group IV channel engineering
dc.typeMeeting abstract
dc.source.peerreviewno
dc.source.beginpage2450
dc.source.conference214th ECS Meeting
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
imec.availabilityPublished - imec
imec.internalnotesECS Meeting Abstracts; Vol. MA 2008-02


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