Electro static discharge in MEMS: sensitivity and protection
dc.contributor.author | Sangameswaran, Sandeep | |
dc.date.accessioned | 2021-10-17T10:25:20Z | |
dc.date.available | 2021-10-17T10:25:20Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14416 | |
dc.source | IIOimport | |
dc.title | Electro static discharge in MEMS: sensitivity and protection | |
dc.type | Oral presentation | |
dc.source.peerreview | no | |
dc.source.conference | IMEC Annual PhD Days | |
dc.source.conferencedate | 17/11/2008 | |
dc.source.conferencelocation | Heverlee Belgium | |
imec.availability | Published - imec |
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