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ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T10:26:08Z
dc.date.available2021-10-17T10:26:08Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14418
dc.sourceIIOimport
dc.titleESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors
dc.typeProceedings paper
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage249
dc.source.endpage257
dc.source.conference30th EOS/ESD Symposium
dc.source.conferencedate7/09/2008
dc.source.conferencelocationTucson, AZ USA
imec.availabilityPublished - imec


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