Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe

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Authors
Sano, K.; Leys, Frederik; Dilliway, Gabriela; Loo, Roger; Mertens, Paul; Snow, J.; Izumi, A.; Eitoku, A.
Conference
Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS
Title
Challenges of single-wafer wet cleaning for low temperature pre-epitaxial treatment of SiGe
Publication type
Proceedings paper
Embargo date
9999-12-31
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