dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Opsomer, Karl | |
dc.contributor.author | Deduytsche, Davy | |
dc.contributor.author | Detavernier, Christophe | |
dc.contributor.author | Blasco, Nicolas | |
dc.contributor.author | Zauner, Andy | |
dc.date.accessioned | 2021-10-17T10:29:37Z | |
dc.date.available | 2021-10-17T10:29:37Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14428 | |
dc.source | IIOimport | |
dc.title | ALD of ZrO2, TiO2 and ZrTiO4 thin films from novel heteroleptic precursors | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Opsomer, Karl | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.source.peerreview | no | |
dc.source.conference | Workshop GerALD | |
dc.source.conferencedate | 22/09/2008 | |
dc.source.conferencelocation | Halle Germany | |
imec.availability | Published - imec | |