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Focused-ion-beam fabrication of slots in silicon waveguides and ring resonators

dc.contributor.authorSchrauwen, Jonathan
dc.contributor.authorClaes, Tom
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-17T10:35:57Z
dc.date.available2021-10-17T10:35:57Z
dc.date.issued2008-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14445
dc.sourceIIOimport
dc.titleFocused-ion-beam fabrication of slots in silicon waveguides and ring resonators
dc.typeProceedings paper
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage55
dc.source.endpage58
dc.source.conferenceAnnual Symposium of the IEEE/LEOS Benelux Chapter
dc.source.conferencedate27/11/2008
dc.source.conferencelocationTwente The Netherlands
imec.availabilityPublished - open access


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