Trimming of silicon ring resonator by electron beam induced compaction and strain

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Authors

Schrauwen, Jonathan; Van Thourhout, Dries; Baets, Roel

ISSN

1094-4087

Issue

6

Journal

Optics Express

Volume

16

Title

Trimming of silicon ring resonator by electron beam induced compaction and strain

Publication type

Journal article

Embargo date

9999-12-31

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