Publication:

Plasma etching: from micro- to nanoscale device manufacturing

Date

2008
Proceedings Paper
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Author(s)

Shamiryan, Denis
;
Paraschiv, Vasile  
;
Milenin, Alexey  
;
Boullart, Werner  
;
Baklanov, Mikhaïl

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1787 since deposited on 2021-10-17
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