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Factors influencing the leakage current in embedded SiGe source/drain junctions

dc.contributor.authorSimoen, Eddy
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorVissouvanadin Soubaretty, Bertrand
dc.contributor.authorChowdhury, Mohammad Kamruzzaman
dc.contributor.authorVerheyen, Peter
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorBender, Hugo
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorTomasini, P.
dc.contributor.authorThomas, S.
dc.contributor.authorLu, J.P.
dc.contributor.authorWeijtmans, J.W.
dc.contributor.authorWise, R.
dc.date.accessioned2021-10-17T10:43:48Z
dc.date.available2021-10-17T10:43:48Z
dc.date.issued2008
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14467
dc.sourceIIOimport
dc.titleFactors influencing the leakage current in embedded SiGe source/drain junctions
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage925
dc.source.endpage930
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue3
dc.source.volume55
imec.availabilityPublished - open access


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