Factors influencing the leakage current in embedded SiGe source/drain junctions

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Authors

Simoen, Eddy; Bargallo Gonzalez, Mireia; Vissouvanadin Soubaretty, Bertrand; Chowdhury, Mohammad Kamruzzaman; Verheyen, Peter; Hikavyy, Andriy; Bender, Hugo; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

ISSN

0018-9383

Issue

3

Journal

IEEE Transactions on Electron Devices

Volume

55

Title

Factors influencing the leakage current in embedded SiGe source/drain junctions

Publication type

Journal article

Embargo date

9999-12-31

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