Publication:

Factors influencing the leakage current in embedded SiGe source/drain junctions

Date

2008
Journal article
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorVissouvanadin Soubaretty, Bertrand
dc.contributor.authorChowdhury, Mohammad Kamruzzaman
dc.contributor.authorVerheyen, Peter
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorBender, Hugo
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorTomasini, P.
dc.contributor.authorThomas, S.
dc.contributor.authorLu, J.P.
dc.contributor.authorWeijtmans, J.W.
dc.contributor.authorWise, R.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T10:43:48Z
dc.date.available2021-10-17T10:43:48Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14467
dc.source.beginpage925
dc.source.endpage930
dc.source.issue3
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume55
dc.title

Factors influencing the leakage current in embedded SiGe source/drain junctions

dc.typeJournal article
dspace.entity.typePublication
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