Factors influencing the leakage current in embedded SiGe source/drain junctions

Simoen, Eddy; Bargallo Gonzalez, Mireia; Vissouvanadin Soubaretty, Bertrand; Chowdhury, Mohammad Kamruzzaman; Verheyen, Peter; Hikavyy, Andriy; Bender, Hugo; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Tomasini, P.; Thomas, S.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

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Factors influencing the leakage current in embedded SiGe source/drain junctions

Date

2008

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Author(s)

Simoen, Eddy

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Bargallo Gonzalez, Mireia

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Vissouvanadin Soubaretty, Bertrand

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Chowdhury, Mohammad Kamruzzaman

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Machkaoutsan, Vladimir

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Journal

IEEE Transactions on Electron Devices

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Acq. date: 2026-05-20

Factors influencing the leakage current in embedded SiGe source/drain junctions

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