Publication:

Factors influencing the leakage current in embedded SiGe source/drain junctions

Date

2008
Journal article
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Author(s)

Simoen, Eddy  
;
Bargallo Gonzalez, Mireia
;
Vissouvanadin Soubaretty, Bertrand
;
Chowdhury, Mohammad Kamruzzaman
;
Verheyen, Peter  
;
Hikavyy, Andriy  
;
Bender, Hugo  
;
Loo, Roger  
;
Claeys, Cor
;
Machkaoutsan, Vladimir  
;
Tomasini, P.
;
Thomas, S.
;
Lu, J.P.
;
Weijtmans, J.W.
;
Wise, R.

Journal

IEEE Transactions on Electron Devices

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1993 since deposited on 2021-10-17
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Acq. date: 2025-12-09

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