Factors influencing the leakage current in embedded SiGe source/drain junctions

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Author(s)

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Bargallo Gonzalez, Mireia

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Vissouvanadin Soubaretty, Bertrand

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Chowdhury, Mohammad Kamruzzaman

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Verheyen, Peter

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Hikavyy, Andriy

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Machkaoutsan, Vladimir

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Weijtmans, J.W.

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Journal

IEEE Transactions on Electron Devices

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1986 since deposited on 2021-10-17

Acq. date: 2025-10-23