Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium

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Authors
Simoen, Eddy; Brugere, Antoine; Satta, Alessandra; Van Daele, Benny; Brijs, Bert; Richard, Olivier; Geypen, Jef; Meuris, Marc; Vandervorst, Wilfried
Conference
SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
Title
Solid-phase epitaxial regrowth of phosphorus implanted amorphized germanium
Publication type
Proceedings paper
Embargo date
9999-12-31
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