Metal in-diffusion during Fe and Co-germanidation of germanium

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Authors
Simoen, Eddy; Opsomer, Karl; Claeys, Cor; Maex, Karen; Detavernier, C.; Van Meirhaeghe, R.L.; Clauws, P.
Conference
Gettering and Defect Engineering in Semiconductor Technology XII
Title
Metal in-diffusion during Fe and Co-germanidation of germanium
Publication type
Proceedings paper
Embargo date
9999-12-31
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