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Leakage current study of Si1-xCx embedded source/drain junctions

dc.contributor.authorSimoen, Eddy
dc.contributor.authorVissouvanadin Soubaretty, Bertrand
dc.contributor.authorTaleb, Nadjib
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorBauer, Matthias
dc.contributor.authorThomas, Shawn
dc.contributor.authorLu, J.-P.
dc.contributor.authorWise, Rick
dc.date.accessioned2021-10-17T10:49:18Z
dc.date.available2021-10-17T10:49:18Z
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14481
dc.sourceIIOimport
dc.titleLeakage current study of Si1-xCx embedded source/drain junctions
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage6140
dc.source.endpage6143
dc.source.journalApplied Surface Science
dc.source.issue19
dc.source.volume254
imec.availabilityPublished - imec
imec.internalnotesPaper from the 5th Int. Symposium on Control of Semicondcutor Interfaces; Nov. 2007


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