Leakage current study of Si1-xCx embedded source/drain junctions

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Authors

Simoen, Eddy; Vissouvanadin Soubaretty, Bertrand; Taleb, Nadjib; Bargallo Gonzalez, Mireia; Verheyen, Peter; Loo, Roger; Claeys, Cor; Machkaoutsan, Vladimir; Bauer, Matthias; Thomas, Shawn; Lu, J.-P.; Wise, Rick

ISSN

0169-4332

Issue

19

Journal

Applied Surface Science

Volume

254

Title

Leakage current study of Si1-xCx embedded source/drain junctions

Publication type

Journal article

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