Publication:

Leakage current study of Si1-xCx embedded source/drain junctions

Date

2008
Journal article
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Author(s)

Simoen, Eddy  
;
Vissouvanadin Soubaretty, Bertrand
;
Taleb, Nadjib
;
Bargallo Gonzalez, Mireia
;
Verheyen, Peter  
;
Loo, Roger  
;
Claeys, Cor
;
Machkaoutsan, Vladimir  
;
Bauer, Matthias
;
Thomas, Shawn
;
Lu, J.-P.
;
Wise, Rick

Journal

Applied Surface Science

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1961 since deposited on 2021-10-17
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1961 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-26

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