Publication:

Leakage current study of Si1-xCx embedded source/drain junctions

Date

2008
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVissouvanadin Soubaretty, Bertrand
dc.contributor.authorTaleb, Nadjib
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorBauer, Matthias
dc.contributor.authorThomas, Shawn
dc.contributor.authorLu, J.-P.
dc.contributor.authorWise, Rick
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-17T10:49:18Z
dc.date.available2021-10-17T10:49:18Z
dc.date.issued2008
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14481
dc.source.beginpage6140
dc.source.endpage6143
dc.source.issue19
dc.source.journalApplied Surface Science
dc.source.volume254
dc.title

Leakage current study of Si1-xCx embedded source/drain junctions

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles