dc.contributor.author | Sioncke, Sonja | |
dc.contributor.author | Brunco, David | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Van Steenbergen, Jan | |
dc.contributor.author | Vrancken, Evi | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-17T10:50:21Z | |
dc.date.available | 2021-10-17T10:50:21Z | |
dc.date.issued | 2008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14484 | |
dc.source | IIOimport | |
dc.title | Etch rate study of germanium, GaAs, and InGaAs: a challenge in semiconductor processing. | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Van Steenbergen, Jan | |
dc.contributor.imecauthor | Vrancken, Evi | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS | |
dc.source.conferencedate | 22/09/2008 | |
dc.source.conferencelocation | Brugge Belgium | |
imec.availability | Published - open access | |