Etching Ge, GaAs and InGaAs: A challenge in semiconductor processing

No Thumbnail [100%x80]
View/open
Metadata
Show full item record
Authors
Sioncke, Sonja; Brunco, David; Meuris, Marc; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc
Conference
214th ECS Meeting
Title
Etching Ge, GaAs and InGaAs: A challenge in semiconductor processing
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections