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Systematic TLM measurements of NiSi and PtSi specific contact resistance to n- and p- type Si in a broad doping range
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Systematic TLM measurements of NiSi and PtSi specific contact resistance to n- and p- type Si in a broad doping range
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Stavitski, Natalie
;
Van Dal, Mark J. H.
;
Lauwers, Anne
;
Vrancken, Christa
;
Kovalgin, Alexey Y.
;
Wolters, Rob A.M.
Journal
IEEE Electron Device Letters
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1877
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Acq. date: 2025-12-11
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Metrics
Views
1877
since deposited on 2021-10-17
4
last month
4
last week
Acq. date: 2025-12-11
Citations