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Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction
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Authors
Stavitski, Natalie
;
Van Dal, Mark J.H.
;
Lauwers, Anne
;
Vrancken, Christa
;
Kovalgin, Alexey Y.
;
Wolters, Rob A.M.
ISSN
0018-9383
Issue
5
Journal
IEEE Transactions on Electron Devices
Volume
55
Title
Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction
Publication type
Journal article
Embargo date
9999-12-31
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