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Evaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction

dc.contributor.authorStavitski, Natalie
dc.contributor.authorVan Dal, Mark J.H.
dc.contributor.authorLauwers, Anne
dc.contributor.authorVrancken, Christa
dc.contributor.authorKovalgin, Alexey Y.
dc.contributor.authorWolters, Rob A.M.
dc.date.accessioned2021-10-17T11:00:44Z
dc.date.available2021-10-17T11:00:44Z
dc.date.issued2008
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14513
dc.sourceIIOimport
dc.titleEvaluation of transmission line model structures for silicide-to-silicon specific contact resistance extraction
dc.typeJournal article
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorVrancken, Christa
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1170
dc.source.endpage1176
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue5
dc.source.volume55
imec.availabilityPublished - open access


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