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Hybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonators

dc.contributor.authorStoffels, Steve
dc.contributor.authorPuers, Bob
dc.contributor.authorMertens, Robert
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-17T11:02:50Z
dc.date.available2021-10-17T11:02:50Z
dc.date.issued2008-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14519
dc.sourceIIOimport
dc.titleHybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonators
dc.typeProceedings paper
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage101
dc.source.endpage104
dc.source.conference19th MicrMechanics Workshop - MME
dc.source.conferencedate28/09/2008
dc.source.conferencelocationAachen Germany
imec.availabilityPublished - imec


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